Abstract:

Around 1980s, following the advancements in semiconductor device fabrication technology, a new class of micro/nanoscale devices collectively referred to as micro/nano-electro-mechanical systems (MEMS/NEMS) emerged, whose functionality (unlike microelectronic devices or circuits) rely on a variety of physical principles including mechanical, chemical, thermal, optical, magnetic phenomena; as well as, exotic nanomaterials and fabrication techniques which are not typical in CMOS. This new class of functional micro/nano devices have already found applications in a variety of fields including consumer electronics, military, aerospace, medicine, biotechnology to name a few. The aim of this talk is to provide an overview of the different research activities ongoing in the Micro/Nano Devices & Systems Lab (SU-MEMS) where we adopt a holistic approach in merging materials with novel nanofabrication techniques to frontier the development of functional devices with particular emphasis on their scalability and system-level integration. I will highlight our existing capabilities to foster interdisciplinary research opportunities especially on topics like monolithic/heterogeneous integration, semiconductor process and materials integration for high performance devices (e.g. RF passives, graphene-enabled sensors) along with technology development in transfer-printing, tip-based nanofabrication; stress-induced self- assembly, and some snapshots on our efforts on biochips, flexible electronics, textile-based wearables.

Short Biography of the Speaker:

Murat Kaya Yapici is a faculty member at Sabanci University-Faculty of Engineering & Natural Sciences, Electronics Engineering Program and an affiliate faculty member in the Department of Electrical Engineering at the University of Washington-Seattle, USA. Dr. Yapici received his B.Sc. and Ph.D. degrees in Electrical Engineering from Texas A&M University-College Station (TAMU) in 2004 and 2009, respectively. Upon completion of his Ph.D. he worked as a post-doctoral researcher in the Solid State Electronics, Photonics and Nano-Engineering Laboratory at TAMU. Dr. Yapici has expert knowledge on device fabrication, microelectronic process technologies, nanofabrication techniques, and characterization tools. His research interests include MEMS/NEMS, nanotechnology. sensors/actuators, microfluidics, acousto-optic devices for biological and medical applications; as well as semiconductor process technology, novel nanofabrication based on scanning probes and integration of nanomaterials, MEMS with CMOS, and wearable/flexible electronics. He is a member of the SPIE, IEEE, IEEE- Engineering in Medicine and Biology Society, IEEE Electron Devices Society, and URSI.